任雯,梁海锋,蔡长龙.碳钛颗粒膜表面电子发射特性[J].表面技术,2012,(3):22-25.
REN Wen,LIANG Hai-feng,CAI Chang-long.Electron Emission Characteristics of C-Ti Granular Films[J].Surface Technology,2012,(3):22-25
碳钛颗粒膜表面电子发射特性
Electron Emission Characteristics of C-Ti Granular Films
投稿时间:2011-12-30  修订日期:2012-06-20
DOI:
中文关键词:  碳钛颗粒膜  表面传导电子发射  伏安特性  场致发射
英文关键词:C-Ti granular films  surface conduction electron emission  volt-ampere characteristics  field emission
基金项目:国家自然科学基金(61007015);陕西省科技厅国际合作项目(2010JK602)
作者单位
任雯 西安工业大学光电学院,西安710032 
梁海锋 西安工业大学光电学院,西安710032 
蔡长龙 西安工业大学光电学院,西安710032 
AuthorInstitution
REN Wen School of Photoelectrical,Xi'an Technological University, Xi'an710032, China) 
LIANG Hai-feng School of Photoelectrical,Xi'an Technological University, Xi'an710032, China) 
CAI Chang-long School of Photoelectrical,Xi'an Technological University, Xi'an710032, China) 
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中文摘要:
      采用磁控溅射技术沉积碳钛颗粒膜,应用图形化工艺制作基于碳钛颗粒膜的表面电子发射原型器件。在幅值渐增的三角波电压作用下,器件在电压幅值低于17V 时,伏安特性呈明显的线性特性,对应的薄膜表面没有变化;进一步升高器件电压幅值,伏安特性呈明显的负阻特性,同时可以观测到表面电子发射,表面电子发射最大达到7.2μA,发射效率达到了0.0943%,薄膜表面失色,产生明显的孔洞结构。根据F-N 理论拟合器件电压和发射电流,所得Ie-Vf 特性曲线呈直线,表明发射电子源于场致电子发射。
英文摘要:
      C-Ti granular films deposited by magnetron sputtering were taken as material of surface-conduction e-lectron emitter for SED(surface-conduction electron-emission display). In the effect of increasing triangular wave voltage,the device voltage amplitude was below 17V, volt-ampere characteristics showed a linear, the corresponding film surface hadn't change; Further increase in device voltage amplitude, volt-ampere characteristics showed a negative resistance characteristics, while the surface electron emission could be observed. The film surface of maximum of surface electron emission current reached to 7.2μA and the emission efficiency reached to 0.0943%, and the film appeared pale and produced significant pore structure. According to F-N theory, fitting the device voltage and emission current, the result appears linear which indicated that electron emission from field emission.
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