袁琳,高原,张维,王成磊,马志康,蔡航伟.负偏压对多弧离子镀TiN 薄膜的影响[J].表面技术,2012,(1):20-22,26.
YUAN Lin,GAO Yuan,ZHANG Wei,WANG Cheng-lei,MA Zhi-kang,CAI Hang-wei.EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP.Surface Technology,2012,(1):20-22,26.
负偏压对多弧离子镀TiN 薄膜的影响
EffectofNegativeBiasVoltageonTiNCoatingDepositedbyMAIP
投稿时间:2011-10-04  修订日期:2012-02-20
DOI:
中文关键词:  多弧离子镀  负偏压  TiN 薄膜  耐蚀性
英文关键词:MAIP  negative bias voltage  TiN coating  corrosion resistance
基金项目:国家自然科学基金(50764002);广西区自然科学基金重点项目(2010GXNSFD013008);信息材料广西重点实验室主任研究项目(桂科能0710908-06-Z)
作者单位
袁琳 桂林电子科技大学材料科学与工程学院,桂林541004 
高原 桂林电子科技大学材料科学与工程学院,桂林541004 
张维 桂林电子科技大学材料科学与工程学院,桂林541004 
王成磊 桂林电子科技大学材料科学与工程学院,桂林541004 
马志康 桂林电子科技大学材料科学与工程学院,桂林541004 
蔡航伟 桂林电子科技大学材料科学与工程学院,桂林541004 
AuthorInstitution
YUAN Lin School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
GAO Yuan School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
ZHANG Wei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
WANG Cheng-lei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
MA Zhi-kang School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
CAI Hang-wei School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin541004,China 
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中文摘要:
      采用不同偏压,在201不锈钢表面进行多弧离子镀TiN 薄膜,研究了偏压对薄膜表面形貌、硬度、相结构及耐蚀性的影响。研究表明:薄膜表面存在着许多液滴颗粒,随着偏压的增加,液滴减少,但过大的偏压会使表面出现凹坑;薄膜的显微硬度随偏压的升高先增大后减小,偏压为-200V 时的本征硬度为2195HV;在3.5%的NaCl溶液中,TiN 薄膜试样的耐蚀性比基体略有提高,在1mol/L的H2SO4 溶液中,偏压-100V 制备的试样耐蚀性最好,比基材提高了475倍。
英文摘要:
      TiN coatings of different negative bias voltage were deposited on 201 stainless steel by multi-arc ion plating(MAIP). The effect of negative bias voltage on the surface microstructure, hardness, phase structure and the corrosion resistance of the coatings was investigated. Results showed that there were many droplet particles in the surface. When the negative bias voltage increased, the number and size of droplets decreased; But when the substrate bias increased to a certain value, there appeared some pits. The hardness increased at first but decreased later with the increasing of the negative bias voltage. When the negative bias voltage was-200V, the intrinsic hardness of TiN film was 2 195HV. Compared with 201 stainless steel,the corrosion resistance of TiN coatings samples was improved slightly in 3.5% NaCl solution; In l mol/L H2SO4 solution, the corrosion resistance of the-100V sample was best; Compared with untreated 201 stainless steel, the corrosion resistance of the-100V coating sample was increased 475 times.
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