李丽,吴卫,张尧成.磁控溅射中溅射电流对Ti薄膜膜基结合性能的影响[J].表面技术,2010,39(5):92-94.
LI Li,WU Wei,ZHANG Yao-cheng.Effect of Sputtering Current on Adhesion Strength of Ti Film Deposited by Magnetron Sputtering[J].Surface Technology,2010,39(5):92-94
磁控溅射中溅射电流对Ti薄膜膜基结合性能的影响
Effect of Sputtering Current on Adhesion Strength of Ti Film Deposited by Magnetron Sputtering
投稿时间:2010-07-17  修订日期:2010-10-10
DOI:
中文关键词:  Ti膜  磁控溅射  溅射电流  附着强度
英文关键词:Ti film  magnetron sputtering  sputtering current  adhesion strength
基金项目:
作者单位
李丽 齐齐哈尔职业学院机电系,齐齐哈尔151006 
吴卫 西华大学材料科学与工程学院,成都610039 
张尧成 上海交通大学材料科学与工程学院,上海200240 
AuthorInstitution
LI Li Mechatronics Department, Qiqihar Vocational School, Qiqihaer 151006, China 
WU Wei School of Material Science and Engineering, Xihua University, Chengdu 610039, China 
ZHANG Yao-cheng School of Material Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China 
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中文摘要:
      研究在磁控溅射工艺中工作压强和溅射时间恒定的情况下,溅射电流的变化对钛膜与基底Gd结合能力的影响。通过拉伸法测量薄膜与基体间的附着强度,利用扫描电镜观察Ti膜表面形貌。结果表明:溅射电流达到3 A时,Ti膜表面平整,与基体的结合力最强。由此说明,溅射电流的变化对钛膜与基底Gd结合能力的影响较大。
英文摘要:
      The effect of sputtering current on adhesion strength of Ti film and Gd basis when the working pressure and time is constant was discussed. The adhesion strength between the film and the basis was tested by tension test, and the surface was investigated by SEM. The results show that when the sputtering current reachs 3 A, the surface of the Ti film is smooth, and the adhesion strength with the matrix is the strongest. It can be concluded that the variation of the sputtering current has prominent effect on the adhesion strength between the Ti film and the Gd.
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