张玲,赖起邦,崔万国,王辅明.拉曼光谱表征无氢类金刚石薄膜的新方法[J].表面技术,2010,39(4):103-105.
ZHANG Ling,LAI Qi-bang,CUI Wan-guo,WANG Fu-ming.New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films[J].Surface Technology,2010,39(4):103-105 |
| 拉曼光谱表征无氢类金刚石薄膜的新方法 |
| New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films |
| 投稿时间：2010-04-05 修订日期：2010-08-10 |
| DOI： |
| 中文关键词: 类金刚石薄膜 拉曼光谱 sp3含量 G峰 |
| 英文关键词:DLC Raman spectra sp3 content G peak |
| 基金项目:福建省半导体照明工程技术研究中心资助项目(2006H0092) |
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| 中文摘要: |
| DLC薄膜的拉曼光谱表征主要依靠D峰和G峰的强度比值(ID/ IG)来定性判断sp3含量,但当sp3所占百分比高于20%时,ID/ IG值对sp3含量的变化不敏感,判断的误差很大。采用直流磁控溅射和多弧离子镀制备了一系列无氢DLC薄膜样品,并测量了样品的拉曼光谱和维氏硬度。通过数据分析,发现薄膜硬度和拉曼光谱中的G峰半峰宽具有很好的相关性,因而提出通过G峰半峰宽来定量判断DLC薄膜中sp3含量的拉曼光谱表征新方法。 |
| 英文摘要: |
| The ratio between intensities of the D peak and the G peak(ID/ IG)is used to estimate sp3 content of the DLC films. However, this method has limitations. When sp3 content exceeds 20%, ID/ IGhas very low correlations with the content of sp3, therefore,estimation of sp3 content using this method could lead to significant error.DC-magne-tron sputtering and multiple-arc ion plating are used to deposit a series of hydrogen-free diamond-like carbon samples. Raman spectra and Vickers hardness of samples were measured and analyzed. A strong correlation between the hardness and G-peak's full width at half maximum(FWHM)was discovered. The results show that it's feasible to measure the content of sp3 by using the G-peak's FWHM in Raman spectra. |
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