张玲,赖起邦,崔万国,王辅明.拉曼光谱表征无氢类金刚石薄膜的新方法[J].表面技术,2010,39(4):103-105.
ZHANG Ling,LAI Qi-bang,CUI Wan-guo,WANG Fu-ming.New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films[J].Surface Technology,2010,39(4):103-105
拉曼光谱表征无氢类金刚石薄膜的新方法
New Method for Analyzing Raman Spectra of Hydrogen-free Diamond-like Carbon Films
投稿时间:2010-04-05  修订日期:2010-08-10
DOI:
中文关键词:  类金刚石薄膜  拉曼光谱  sp3含量  G峰
英文关键词:DLC  Raman spectra  sp3 content  G peak
基金项目:福建省半导体照明工程技术研究中心资助项目(2006H0092)
作者单位
张玲 厦门大学物理系,厦门361005 
赖起邦 厦门大学物理系,厦门361005 
崔万国 厦门大学物理系,厦门361005 
王辅明 厦门大学物理系,厦门361005 
AuthorInstitution
ZHANG Ling Physics Department of Xiamen University, Xiamen 361005, China 
LAI Qi-bang Physics Department of Xiamen University, Xiamen 361005, China 
CUI Wan-guo Physics Department of Xiamen University, Xiamen 361005, China 
WANG Fu-ming Physics Department of Xiamen University, Xiamen 361005, China 
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中文摘要:
      DLC薄膜的拉曼光谱表征主要依靠D峰和G峰的强度比值(ID/ IG)来定性判断sp3含量,但当sp3所占百分比高于20%时,ID/ IG值对sp3含量的变化不敏感,判断的误差很大。采用直流磁控溅射和多弧离子镀制备了一系列无氢DLC薄膜样品,并测量了样品的拉曼光谱和维氏硬度。通过数据分析,发现薄膜硬度和拉曼光谱中的G峰半峰宽具有很好的相关性,因而提出通过G峰半峰宽来定量判断DLC薄膜中sp3含量的拉曼光谱表征新方法。
英文摘要:
      The ratio between intensities of the D peak and the G peak(ID/ IG)is used to estimate sp3 content of the DLC films. However, this method has limitations. When sp3 content exceeds 20%, ID/ IGhas very low correlations with the content of sp3, therefore,estimation of sp3 content using this method could lead to significant error.DC-magne-tron sputtering and multiple-arc ion plating are used to deposit a series of hydrogen-free diamond-like carbon samples. Raman spectra and Vickers hardness of samples were measured and analyzed. A strong correlation between the hardness and G-peak's full width at half maximum(FWHM)was discovered. The results show that it's feasible to measure the content of sp3 by using the G-peak's FWHM in Raman spectra.
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