万维威,何翔,孙奉娄.Ti-O薄膜中O含量对紫外光-可见光吸收的影响[J].表面技术,2010,39(1):45-47.
WAN Wei-wei,HE Xiang,SUN Feng-lou.Absorption UV and Visible Spectrum of Ti-O Films Affected by O Content[J].Surface Technology,2010,39(1):45-47 |
| Ti-O薄膜中O含量对紫外光-可见光吸收的影响 |
| Absorption UV and Visible Spectrum of Ti-O Films Affected by O Content |
| 投稿时间：2009-10-28 修订日期：2010-02-10 |
| DOI： |
| 中文关键词: Ti-O薄膜 射频磁控溅射 禁带宽度 红移 |
| 英文关键词:Ti-O films RF magnetron Band gap Red-shifted |
| 基金项目:武汉市重点科技攻关计划项目(200761023420) |
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| 中文摘要: |
| 应用射频磁控溅射技术在普通载玻片上镀制一层均匀的Ti-O薄膜,采用红外光谱仪对其进行红外吸收光谱分析,采用紫外光-可见光分光光度计测量其吸光度,得到了在不同O含量条件下制备的Ti-O薄膜对紫外光-可见光的吸收情况,并进行了比较。实验结果表明:随着O含量的逐渐减少,Ti-O薄膜的结构从TiO2逐渐转变为多种Ti-O结构共存,并且其吸收峰出现红移现象。 |
| 英文摘要: |
| The Ti-O films were coated on common glasses by RF magnetron sputtering technique. The absorption infrared spectrums of the Ti-O films were analyzed by infrared spectrometer. The absorbances of the Ti-O films were measured by uv-vis spectrophotometer, so we obtained and compared the absorption UV and visible spectrum of the Ti-O films with different oxygen content. The experiment results show that while the oxygen content decreases the compositions of the films are changed from TiO2to different structures of Ti-O and the absorption spectrum red-shifted of the Ti-O films happens. |
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