李国明,孙世尧,陈学群.工艺参数对离子束辅助沉积TiN薄膜性能的影响[J].表面技术,2008,37(6):66-68.
LI Guo-ming,SUN Shi-yao,CHEN Xue-qun.Effects of Film Forming Parameter on the Properties of Ion-beam Aiding Deposition TiN Thin Film[J].Surface Technology,2008,37(6):66-68 |
| 工艺参数对离子束辅助沉积TiN薄膜性能的影响 |
| Effects of Film Forming Parameter on the Properties of Ion-beam Aiding Deposition TiN Thin Film |
| 投稿时间：2008-07-23 修订日期：2008-12-10 |
| DOI： |
| 中文关键词: 铁铬钼软磁合金 离子束辅助沉积 显微硬度 耐蚀性 TiN薄膜 |
| 英文关键词:Fe-Cr-Mo magnetism alloys Ion-beam aiding deposition Microhardness Corrosion resistance,TiN film |
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| 中文摘要: |
| 为进一步提高牙科材料的生物相容性、耐磨性和耐腐蚀性能，将离子束辅助沉积制备TiN纳米薄膜技术引入到铁铬钼牙科材料的研究中，在Fe-Cr-Mo合金基体上制备了TiN薄膜。测定了表面膜层的显微硬度，在模拟口腔环境的溶液中，采用电化学方法，对经不同工艺参数沉积TiN薄膜的牙科用Fe-Cr-Mo合金的耐蚀性进行测试，并以未进行表面镀膜的Fe-Cr-Mo合金为对照。结果表明：经TiN镀膜处理的Fe-Cr-Mo软磁合金硬度明显增加，在口腔环境中的耐腐蚀性较未经表面镀膜处理的有明显提高。工艺参数不同，硬度增加的程度不同，耐蚀性差别也较大，当氮气流量为1. 5mL/min，溅射时间为4h时，得到的膜厚为2μm，此时TiN膜硬度最高，在口腔溶液中耐腐蚀性最好。 |
| 英文摘要: |
| To improve the biocompatibility and abrasion resistance and corrosion resistance of the dentistry materials, the ion-beam assisted deposition (IBAD) method was introduced to the study on the dentistry Fe-Cr-Mo alloys. The thin TiN film was prepared on the substrate of dentistry Fe-Cr-Mo alloys using IBAD method. The hardness of the film was measured. In the simulated mouth solution, the corrosion resistance of this film was examined in terms of corrosion potential, corrosion current density, polarization resistance and dynamic polarization curves. The blank Fe-Cr-Mo alloys substrate was used as comparison group. The results show that Fe-Cr-Mo alloys with TiN film has higher hardness and better corrosion resistance than the alloys without IBAD treatment. The TiN film has different hardness and corrosion resistance according to different film forming parameters. In IBAD treatment, when the nitrogen flux rate is l. 5ml/min and the treating time is 4 hours, we can obtained the most abrasion resistant and corrosion resistant TiN thin film in the simulated mouth solution. |
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