银陈,陈长安,张鹏程.PECVD制备Al-Al2O3复合阻氢涂层的研究[J].表面技术,2008,37(3):41-43,48.
YIN Chen,CHEN Chang-an,ZHANG Peng-cheng.Research of Al-AI203 Resisting Hydrogen Cmposite Films Prepared by PECVD[J].Surface Technology,2008,37(3):41-43,48 |
| PECVD制备Al-Al2O3复合阻氢涂层的研究 |
| Research of Al-AI203 Resisting Hydrogen Cmposite Films Prepared by PECVD |
| 投稿时间：2008-04-03 修订日期：2008-06-10 |
| DOI： |
| 中文关键词: PECVD 复合薄膜 阻氘因子 Al-Al2 03 |
| 英文关键词:PECVD Composite films PRF Al-Al203 |
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| 中文摘要: |
| 为了提高不锈钢的阻氢性能，利用PECVD（等离子体增强化学气相沉积）技术在不锈钢表面上制备了Al薄膜，经真空热氧化处理(480℃)获得了Al-Al2 03复合薄膜。用表面分析手段SEM、XRD、EDS和XPS对所制备涂层的表面形貌、相结构、表面成分、表面元素的化学态进行了分析，并对其进行了阻氘性能研究。结果表明：该技术能够获得均匀、致密复合薄膜；在低于350℃时，阻氘效果非常好，几乎没有渗透，在350℃到450℃之间，阻氘因子能够达到250左右，但在高于450℃后，渗透非常明显。 |
| 英文摘要: |
| For the sake ofimproving hydrogen resistance property of stainless steel, Al film was prepared on surface of stainless steel by plasma enhanced chemical vapor deposition, Al-Al203 composite films were obtained by vacuum thermal oxidation(480℃ ) . The films surface morphologies, phase structures, composition and elements chemical valence were all analyzed by SEM,XRD,EDS and XPS surface analysis methods. Whereafter its deuterium resistance property was researched. Results indicate that the composite films are uniformity and smooth and compact, under 350℃ , deuterium resistance property is perfect, even no penetration; between 350℃ and 450℃ , PRF can reach 250; but penetration is very distinct over 450℃ . |
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