梅芳,弓满锋,李玲.溅射技术在SiC薄膜沉积中的应用和工艺研究进展[J].表面技术,2008,37(2):75-78.
MElfang,GONG Man-feng,LI Ling.Application and Technologic Progress of Sputtering for the SiC Coating[J].Surface Technology,2008,37(2):75-78 |
| 溅射技术在SiC薄膜沉积中的应用和工艺研究进展 |
| Application and Technologic Progress of Sputtering for the SiC Coating |
| 投稿时间：2007-10-17 修订日期：2008-04-10 |
| DOI： |
| 中文关键词: 溅射技术 SiC薄膜 进展 |
| 英文关键词:Sputtering SiC coating Progress |
| 基金项目:湛江师范学院重点科研项目( L0507) |
|
|
| Author | Institution |
| MElfang | Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China |
| GONG Man-feng | 1. Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China;2. National Key Laboratory of Thermostructure Composite Materials,Northwestem Polytechnical University, Xian 710072, China |
| LI Ling | Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China |
|
| 摘要点击次数: |
| 全文下载次数: |
| 中文摘要: |
| 近年来，国内外SiC薄膜材料制备工艺研究迅速发展，由此带来SiC薄膜性能方面的研究也获得长足的进步，新技术、新工艺、新性能不断涌现。溅射SiC技术相对于其它沉积技术（CVD、PIP等）有许多独特的优点：沉积温度低、结合性和致密性好、表面平整、硬度高、光电性能优异以及工艺安全环保等，因此越来越受到重视，且已经成为沉积高性能SiC薄膜的重要技术方法。主要论述了几种不同溅射技术，着重介绍了溅射技术在SiC薄膜制备中的研究进展及SiC薄膜性能方面的研究进展和应用，并且展望了溅射技术制备SiC薄膜的发展前景和当前热点研究领域。 |
| 英文摘要: |
| In recent years, the deposited technologies of SiC coatings have made great progress, which makes great development for the study of the property of SiC coatings , the new technology and the new property emerge continually. Comparing with the other technologies ( CVD and PIP) , the sputtering technology has many profits : the low deposited temperature, high adhesive strength and compaction, smooth surface, enhanced hardness, enhanced optics and electrics characteristic and soft-environmental, so it has been focused on depositing the SiC coatings more and more. The theory and deposited technology about several sputtering technologies were discussed; the sputtering-technologic progress, characteristic and application of SiC coatings were emphasized; and the developing foreground and the hotspots about the sputtering SiC coating were expected. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
渝公网安备 50010702501715号