钟春良,董师润,喻利花,许俊华.Cr1-xAlxN涂层的微结构和抗氧化性能研究[J].表面技术,2007,36(6):12-14,24.
ZHONG Chun-Iiang,DONG Shi-run,YU Li-hua,XU Jun-hua.The Study on Microstructure and Oxidation Resistance for Cri_xAlxN Coating[J].Surface Technology,2007,36(6):12-14,24 |
| Cr1-xAlxN涂层的微结构和抗氧化性能研究 |
| The Study on Microstructure and Oxidation Resistance for Cri_xAlxN Coating |
| 投稿时间：2007-07-27 修订日期：2007-12-10 |
| DOI： |
| 中文关键词: 磁控溅射 Cr1-xAlxN涂层 微结构 抗氧化 |
| 英文关键词:Magnetron sputtering Cri _xAlxN coatings Microstructure Oxidation resistance |
| 基金项目:国家自然科学基金资助项目(50574044) |
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| Author | Institution |
| ZHONG Chun-Iiang | School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003 , China |
| DONG Shi-run | School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003 , China |
| YU Li-hua | School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003 , China |
| XU Jun-hua | School of Materials Science and Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003 , China |
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| 中文摘要: |
| 采用磁控反应溅射法制备了一系列不同Al含量的Cr1-xAlxN涂层，通过能谱仪(EDS)测试涂层的成分，X射线衍射仪(XRD)表征涂层的微结构，扫描电镜(SEM)观察涂层的表面形貌，研究了Al含量对涂层的微结构和高温抗氧化性能的影响。结果表明，涂层取CrN的面心立方结构生长，且呈(111)择优取向。随着Al含量增加，涂层的晶格常数减小，涂层的高温抗氧化性能显著提高。Cro.6356 Alo.3644N涂层随着氧化温度的升高，表面的Al含量略为上升，在9000C涂层产生裂纹失效。 |
| 英文摘要: |
| A series of Cri_xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure , surface morphology of the coatings were characterized by energy dispersive spectroscopy ( EDS) , X-ray diffraction ( XRD) and scanning electron microscopy ( SEM) . The effect of Al content on the microstructure and oxidation resistance was studied. It was found that the coatings take the fcc-CrN structure with a ( 111) preferential orientation. The lattice constant of the coatings gradually decreases, and the oxidation resistance obviously improves with the increase of Al content, Al content on the surface of Cr0.6356Al0.3644N coatings increases slightly with oxidation temperature raising, and the coatings fail with crack inducing at 900℃ . |
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