韦美琴,张光胜,姚文杰.溶胶一凝胶法制备掺铝氧化锌薄膜[J].表面技术,2007,36(4):34-36.
WEI Mei-qin,ZHANG Guang-sheng,YAO Wen-jie.Aluminum-doped Zno Thin Films by the Sol-Gel Method[J].Surface Technology,2007,36(4):34-36 |
| 溶胶一凝胶法制备掺铝氧化锌薄膜 |
| Aluminum-doped Zno Thin Films by the Sol-Gel Method |
| 投稿时间：2007-03-29 修订日期：2007-08-10 |
| DOI： |
| 中文关键词: 溶胶一凝胶法 铝离子掺杂 c轴择优取向 光电性能 氧化锌薄膜 |
| 英文关键词:Sol-gel method Al-doping C-axis orientation Electrical and optical properties Zno thin film |
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| 中文摘要: |
| 采用溶胶一凝胶工艺在普通玻璃片上制备了掺铝氧化锌薄膜。通过X-射线衍射(XRD)、原子力显微镜(AFM)对薄膜的组织结构和形貌进行了表征，结果表明：用溶胶一凝胶法制得的掺铝氧化锌薄膜为纤锌矿型结构，呈c轴方向择优生长，表面均匀、致密。通过紫外·可见透射光谱(uv)和标准四探针法对薄膜的光电性能进行了研究。试验发现，当铝离子掺杂浓度为4%（摩尔分数）、溶胶物质的量浓度为0. 6mol/L、前处理温度为3000C时，薄膜在可见光区的透过率超过80%，且具有较好的导电性，电阻率为8.0×10 -4Ω．cm。 |
| 英文摘要: |
| Al-doped Zno thin films were fabricated on glass substrates by sol-gel method. Their microstructures and morphologies were studied with X-ray diffraction ( XRD) and atomic force microscopy( AFM) . The results indicate that the thin films by the Sol-Gel method are c-axis orientation , homogeneous and dense surface with the crystalline structure of hexagonal wurtzite. Using the measurement of UV-Vis transmittance spectroscopy and standard four probes method, the electrical and optical properties of Al-doped Zno thin films were investigated. The experimental data show that their optical transmittance are over 80% in visible region and their favorable electrical conducting has been achieved with resistivity of 8. 0 xl0 -4Ω . cm derived by Al/Zn ratios of 4. 0% ; sol concentration of 0. 6mol/L; re-heat treatment at 300 0C ; annealing at 500℃ . |
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