张碧云,曲燕青,谢红梅,聂朝胤.类金刚石膜的制备技术及应用领域概况[J].表面技术,2007,36(3):70-73.
ZHANG Bi-yun,QU Yan-qing,XIE Hong-mei,NIE Chao-yin.Review of Preparation and Application of Diamond-Iike Carbon Films[J].Surface Technology,2007,36(3):70-73
类金刚石膜的制备技术及应用领域概况
Review of Preparation and Application of Diamond-Iike Carbon Films
投稿时间:2006-10-31  修订日期:2007-06-10
DOI:
中文关键词:  类金刚石  薄膜  制备  应用  沉积技术
英文关键词:DLC  Film  Preparation  Application  Deposition process
基金项目:重庆市自然科学基金( CSTC,2006BB4050);校发展基金( SWNUF2005001)
作者单位
张碧云 西南大学材料科学与工程学院,重庆400715 
曲燕青 西南大学材料科学与工程学院,重庆400715 
谢红梅 西南大学材料科学与工程学院,重庆400715 
聂朝胤 西南大学材料科学与工程学院,重庆400715 
AuthorInstitution
ZHANG Bi-yun Materials Science and Engineering College of Southwest University, Chongqing 400715 , China 
QU Yan-qing Materials Science and Engineering College of Southwest University, Chongqing 400715 , China 
XIE Hong-mei Materials Science and Engineering College of Southwest University, Chongqing 400715 , China 
NIE Chao-yin Materials Science and Engineering College of Southwest University, Chongqing 400715 , China 
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中文摘要:
      简要介绍了类金刚石膜的结构,综述了类金刚石膜的传统制备方法以及其制备方法的基本原理和优缺点,同时介绍了几种近年发展起来的新兴制备方法,与传统制备方法相比,它更能提高膜的沉积速率和质量。总结了类金刚石膜在机械、电子、光学、医学、航空等领域的应用状况。同时指出,随着DLC技术上的成熟,其必将在更多领域发挥越来越大的作用。
英文摘要:
      The structure of the diamond-like carbon( DLC) film is briefly discussed. The conventional preparation methods of DLC films and their basic principles, the merits and defects were reviewed. Some new preparation methods which were developing recently were introduced. Compared with the conventional methods, it can increase the deposition speed and quality. The applications of the films in the fields of machinery, electronics, optics, medicine and aviation, etc were summarized. And point out, with the developing of the technology of the DLC , it will exploit the particular advantages in more and more fields.
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